Vacuum pump -Molecular pump
Molecular pump
EVP-FZF series are in very sophisticated high performance and extremely robust pumps are recognized as the new reference in the world of molecular pumps.
Model
|
EVP-FZF 100/180
|
EVP-FZF 150/600
|
EVP-FZF 200/1200
|
Inlet flange |
DN100CF
(copper
sealed)
|
DN100LF
(viton
sealed)
|
DN150CF
(copper
sealed)
|
DN150LF
(viton
sealed)
|
DN200CF
(copper
sealed)
|
DN200LF
(viton
sealed)
|
Pumping speed L/S |
180
|
600
|
1200
|
Ultimate Pressure(Torr) |
4×10-9
|
5×10-8
|
2×10-9
|
4×10-8
|
2×10-9
|
4×10-8
|
Compression ratio |
N2 108
|
H2 5×102
|
N2 109
|
H2 8×103
|
N2 109
|
H2 8×103
|
Rotary speed (rpm) |
36000
|
24000
|
24000
|
Startup time (min) |
6
|
6
|
6
|
Venting flange |
KF25
|
KF40
|
KF40
|
Cooling |
Water Or Air
|
Water Or Air
|
Water Or Air
|
Recommended forevacuum
pump L/S |
2L
|
4L-8L
|
8L-15L
|
Power consumption VA |
100
|
200
|
200
|
Mounting position |
Vertical or Horizontal
|
Vertical ±5°
|
Vertical ±5°
|
Weight (Kg) |
8.5
|
30
|
36
|
|